Handbook of Semiconductor Wafer Cleaning Technology by Werner Kern(Editor), New, Used Books, Cheap Prices, ISBN 0815513313

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Larger Image » Add book review » Tag this book(What's this?)	Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications (Materials Science and Process Technology Series) By: Werner Kern(Editor) ISBN-10: 0815513313 ISBN-13: 9780815513315 Publisher: Noyes Publications - 1993-08-01 Hardcover \| 623 Pages \| List Price: $160.00 (USD) \| Sales Rank: 1037371 Product Dimensions: 9.1 x 6.8 x 1.4 inches Similar Titles All Editions Customer Reviews More details from or

Editorial Reviews

This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date coverage of this rapidly evolving field. Its 13 chapters were written by 19 scientists who are recognized experts. The depth and breadth of the material should appeal to those new in the field as well as to experienced professionals. The volume is intended to serve as a handbook for practitioners and professionals in the field.

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